Máy phủ mẫu MSP-20-MT

Giới Thiệu

MSP-20-MT là dòng máy phủ có đường kính bia phủ mẫu lên tới 100mm nên cho diện tích phủ hiệu dụng rộng hơn so với các thế hệ máy phủ khác.

Bề mặt phủ đồng đều, giảm khả năng charge up mẫu trên các thiết bị chụp mẫu như SEM, TEM và đặc biệt máy FIB.

Vật liệu phủ tùy chọn: Có thể chọn Pt, Pt/Pd, Au....

Sử dụng vận hành đơn giản với thời gian phủ tùy chọn theo tường loại mẫu nhất định.

Characteristics
★ This device which makes conductive film processing on the samples such as electron
microscopes.
★ 4 inches of the target size that can just coat the wide sample.
★ This device is equipped with introduction, pressure adjustment functions such as the
argon gas. This plays an active part for improvement of the film purity.
★ The layout which it is easy to use that the manual manipu lation only pushes the switch
sequentially from the right to the left. The prevention of malfunction function prevents a
push accident. Even several use is available in peace.
★ The coating after the adjustment only pushes the automatic control switch of the device .
★ This device makes much of vacuum velocity and the balance of the electric discharge
condition and automatically controls the vacuum pipe of 2 systems.
★ This device adopts a magnetron method in a target to coat it in the sample which is
vulnerable to ion damage and heat damage.
★ This device is attached by default in target metal plate (Au Pd). It is changeable to a
target you like. (but the purchase price is different from a standard target.)

Specifications
No Item Specifications
1 Target electrode φ 10 0mm magnetron electrode
2 Target metal (thickness 0. 1 mm) A standard: Au Pd , options: Au Pt Pt Pd Ag (t=
3 Applied voltage / electric current Voltage DC 0 500V/ electric current DC0 200mA
4 Sample stage Φ 10 0mm
5 Target sample deistance 4 0m m
6 Sample size Diameter 10 0mm, height 30 mm /max
7 Chamber size Inside diameter 149mmx 82mm in depth
8 Timer Electronic timer made in OMRON company
9 Vacuum system Put the outside; RP50ℓ/min 15 kg
10 Arrival vacuum degree less than 1 (Pa)
11 Atmosph ere gas introduction Use less than quarter inch introduction pipe,
pressure 0.05MPa.
12 Safety measures The fuse according to the system, lid opening
perception sensor
13 Equipment size Main body W420mm X H440mm X D420mm 16 kg
14 Power supply 3m in leng th, AC100V, 10A, 3 earthed line core
plug use belonging to