Micro – General Thermal Microscopy

Micro

Thermal Imaging Microscope for Research and Development
Introduction

As electro-mechanical (MEMS), electro-optical, and medical devices continue to decrease in size, heat generation and thermal dissipation become increasingly important. Most failures in small devices are either caused by excessive heat or they generate excessive heat. Localized heating induces temperature stresses that can affect device reliability and performance.

The Micro radiometric thermal imaging microscope measures and displays the temperature distribution over the surface of small devices.  This enables quick detection of hot spots and thermal gradients which may indicate a defect site and frequently lead to decreased efficiency and early failure.

Lens Options

    Macroscopic
    80µm/pixel spatial resolution
    20µm/pixel spatial resolution
    5µm/pixel spatial resolution

Features and Capabilities

    True temperature mapping using Emissivity Tables
    Analyze thermal images using region statistics
    Record thermal movies with sequence analysis
    Temperature graphing and charting

Thermalyze Thermal Image Analysis Software

Emissivity Tables

Many electronic devices, including semiconductor die, are made up of a variety of materials such as semiconductor substrates, metal traces, gold coatings, and ceramics. These materials have different emissivity properties and therefore emit infrared energy at different levels. For example, when a bare semiconductor die is unpowered, its temperature will be very uniform due to the high thermal conductivity of semiconductor materials. A thermal image captured of the unpowered die will generally show differences between the semiconductor materials and any metallization. These differences in the thermal image are not a result of temperature differences, but are due to the lower emissivity of the metallization.

In order to accurately measure the true temperature of semiconductor devices, it is necessary to compensate for surface emissivity differences on a pixel-by-pixel basis. A single emissivity value applied to a group of pixels is not an effective way to compensate for emissivity differences as emissivity often varies continuously at the junction between materials.

An emissivity table is a two-dimensional data array that contains a separate emissivity value for each individual image pixel. Emissivity tables are used to correct thermal images for variations in surface emissivity. After an unpowered device has been stabilized at a temperature that is higher than ambient temperature, an emissivity table can then be created of the device. Applying the emissivity table to thermal images of the device applies a correction to each individual pixel temperature, allowing you to measure the true temperature anywhere on the device.
Regions

Select a shape and draw regions of any size and shape to enclose areas of the thermal image.

Each region's settings and real-time temperature statistics are displayed in the region data grid.

Different settings can be assigned to each individual region. High and low temperature limits can be specified to test the max, min or mean temperatures within regions.

Image Sequences

Record and play back image sequences using familiar multimedia controls.

Recording an image sequence can be synchronized with the relays in order to control power to a unit under test.

Create videos of image sequence in AVI format to email to coworkers or to incorporate into reports.

Graphs and Charts

Plot the max, min or mean temperature from selected regions in real-time.  Strip chart data can be saved and exported in ASCII text format.

Draw line regions anywhere on an image, in any direction, and display the temperature profile along the lines.  Precisely locate thermal anomalies along a line using the Line Measurement tool.

Plot the histogram of temperature values within any region.